为了提升该材料在石英基板上的导电性，这些研究人员使用了真空退火(vacuum annealing)工艺，不过目前他们正在尝试取消这一步骤，因为据称这种改进将有可能实现低温下在柔性塑料基板上制作石墨烯电极。
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... 真空附件 vacuum aluminized reflector 真空镀铝反射镜 vacuum annealing 真空退火炉 vacuum apparatus ...
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vacuum annealing furnace 真空退火炉
vacuum-annealing 真空退火
vacuum annealing process 真空退火工艺
vacuum annealing temperature 真空退火温度
ultra-high vacuum annealing 超高真空退火
high vacuum annealing furnace 高真空退火炉
online vacuum annealing processing 在线真空退火工艺
semicontinuous vacuum annealing furnace 半连续真空退火炉
S16D British vacuum annealing furnace S16D型英国真空退火炉
/, TCR over -3%/K. In the study on deposition conditions, the effects of Ar/O2, sputtering power, gas pressure, vacuum annealing, substrate types and substrate temperature on the performance of vanadium oxide thin films are analyzed.
在工艺参数对氧化钒薄膜性能影响的研究中,得到了基片温度、基片类型、氩氧比例以及真空退火等条件对氧化钒薄膜性能的影响。
参考来源 - 非制冷红外探测器用高TCR氧化钒薄膜的制备研究The higher substrate temperature is, the larger residual stress is, and it is obviously larger than the vacuum annealing films.
衬底温度越高残余应力越大,而且明显高于真空退火薄膜的应力值。
参考来源 - 退火温度与衬底温度对TiNi薄膜组织结构和相变行为的影响·2,447,543篇论文数据，部分数据来源于NoteExpress
The effect of vacuum annealing was also discussed.
也讨论了真空退火的影响。
The prepared films were treated by vacuum annealing, and the structure of films before and after annealing was studied by Raman Spectrum.
对制备的薄膜进行了真空退火处理，并对退火前后的薄膜进行了拉曼结构分析。
The accurate control of the work pieces temperature in vacuum annealing furnace is a typical nonlinear large time delay and cross coupling complicated problem.
而在真空退火的生产过程中，退火工件温度的精确控制是一个典型的非线性、大时滞、强耦合的复杂控制问题。
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